Pdf precursors of gate oxide degradation in sic power. When a large positive voltage is applied to the metal with respect to the substrate, the lefthand side of the band diagram is lowered, and tunneling of electrons from the conduction band of the semiconductor into the conduction band of the oxide, through an approximately triangular barrier can occur, as shown in fig. Gate oxide tunneling as the thickness between the oxide and gate is reduced, to such an extent, that some amount of current starts flowing through the gate into the substrate. Gate tunneling current and quantum capacitance in metal. Ecb controls gatetobody tunneling in accumulation for pmos. Experimental and theoretical analyses of gate oxide and.
A simple method of calculating the penetration probability of the energetic electrons, and the tunneling current is proposed. On the basis of the same parameters with the tested sic mosfet, figs. One of these benefits is the ease of use of the mosfet devices in high frequency switching applications. Gate current in metal oxide semiconductor mos devices, caused by carriers tunneling through a classically forbidden energy barrier, is studied in this paper. These leakage currents are due to quantum mechanical effects electron tunneling through gate. Fundamentals of mosfet and igbt gate driver circuits. These high current drive nmosfets were fabricated with a 1.
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